JPH0375878U - - Google Patents

Info

Publication number
JPH0375878U
JPH0375878U JP13832389U JP13832389U JPH0375878U JP H0375878 U JPH0375878 U JP H0375878U JP 13832389 U JP13832389 U JP 13832389U JP 13832389 U JP13832389 U JP 13832389U JP H0375878 U JPH0375878 U JP H0375878U
Authority
JP
Japan
Prior art keywords
substrate
spin chuck
balancer
attached
rotation processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13832389U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0719582Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13832389U priority Critical patent/JPH0719582Y2/ja
Publication of JPH0375878U publication Critical patent/JPH0375878U/ja
Application granted granted Critical
Publication of JPH0719582Y2 publication Critical patent/JPH0719582Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP13832389U 1989-11-28 1989-11-28 基板の回転処理装置 Expired - Lifetime JPH0719582Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13832389U JPH0719582Y2 (ja) 1989-11-28 1989-11-28 基板の回転処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13832389U JPH0719582Y2 (ja) 1989-11-28 1989-11-28 基板の回転処理装置

Publications (2)

Publication Number Publication Date
JPH0375878U true JPH0375878U (en]) 1991-07-30
JPH0719582Y2 JPH0719582Y2 (ja) 1995-05-10

Family

ID=31685430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13832389U Expired - Lifetime JPH0719582Y2 (ja) 1989-11-28 1989-11-28 基板の回転処理装置

Country Status (1)

Country Link
JP (1) JPH0719582Y2 (en])

Also Published As

Publication number Publication date
JPH0719582Y2 (ja) 1995-05-10

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